Photo electron Soul makes electron beam systems for semiconductor wafer inspection, including its PES-2020 e-Beam System.
Founded in 2015 in Nagoya, Japan, Photo electron Soul Inc. develops semiconductor photocathode electron beam generators, e-beam systems for semiconductor inspection tools and electron beam devices for industrial processing. Its flagship PES-2020 e-Beam System is sold to semiconductor manufacturers and research institutions through customized contracts. In March 2026 the company raised JPY 900 million in venture funding from SHIBAURA MECHATRONICS CORPORATION, Higin Capital and Hotung Investment Holdings.
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