Sichuan Kaiwu makes dry vacuum pumps and related components for semiconductor and other manufacturing processes.
Sichuan Kaiwu develops and manufactures dry vacuum pumps and related components used in semiconductor, photovoltaic, display and advanced materials production. Its equipment supports processes including etching, deposition, ion implantation and packaging. Founded in 2023 in Deyang, China, the company completed Series A+ funding in January 2026 from Ningbo Zhenhai Industrial Development Fund Management and returning investor Ningbo Painuo Equity Investment.
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